Semiconductor materials
We are developing high-quality materials with low metal and low particle properties compatible with a range of semiconductor applications. With our ICP-MS and liquid particle counters, we can control metal concentrations at the ppb level and particles at the nm level.
Low Metal and Low Particle
In semiconductor manufacturing, impurities are strictly controlled because they cause pattern defects and degradation of electrical properties. Using ICP-MS and liquid particle counters, we can manage metals and particles in monomers and solvents at the ppb and nm levels, respectively.
Prototype Sample Results
| Metal specification* | Particle specification* | ||
|---|---|---|---|
| Material A | Monomer composition（＜30cP） | ＜10ppb | ＜200cts/mL @130nmUP |
| Material B | Polymer composition（＜30cP） | ＜5ppb | ＜20cts/mL @130nmUP |
*Al,Ca,Cr,Cu,Fe,K,Li,Mg,Mn,Na,Ni,Pb,Sn,Zn
