Low Metal and Low Particle Processing
We have expertise in adsorbent and filter technologies for semiconductor material manufacturing. With our in-house ICP-MS instruments and liquid particle counters, we can manage products with metal concentrations at the ppb level and particle counts at the 100 nm level.
Purification Performance (Low-Metal Content)
| Maximum Processing Volume | 15L *Scale-up under consideration |
|---|---|
| Lower Limit of Quantification | 200ppt（PGMEA） Metals Li,Na,Mg,Al,K,Ca,Cr,Mn,Fe,Co,Ni,Cu,Zn,Sr Pd,Sn,Ba,Pb,Ti |
| Metal Reduction Methods | Adsorbents, filters |
| Performance | Reduced metal concentration from 2,000 ppb to 50 ppb |
Metal Concentration
Purification Performance (Low-Particle Content)
| Maximum Processing Volume | 18L *Scale-up under consideration |
|---|---|
| Particle Reduction Method | Circulating filtration |
| Performance | In circulating filtration of PGMEA (4L), particles with a diameter ≥ 70 nm were reduced from 4,687 particles/mL to 0.3 particles/mL over 10 hours |
Particle Count ≥ 70 nm in Diameter
